An Ultra-High Element Density pMUT Array with Low Crosstalk for 3-D Medical Imaging
نویسندگان
چکیده
منابع مشابه
An Ultra-High Element Density pMUT Array with Low Crosstalk for 3-D Medical Imaging
A ~1 MHz piezoelectric micromachined ultrasonic transducer (pMUT) array with ultra-high element density and low crosstalk is proposed for the first time. This novel pMUT array is based on a nano-layer spin-coating lead zirconium titanium film technique and can be fabricated with high element density using a relatively simple process. Accordingly, key fabrication processes such as thick piezoele...
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ژورنال
عنوان ژورنال: Sensors
سال: 2013
ISSN: 1424-8220
DOI: 10.3390/s130809624